DocumentCode
1557597
Title
Analytic solutions of charge and capacitance in symmetric and asymmetric double-gate MOSFETs
Author
Taur, Yuan
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Volume
48
Issue
12
fYear
2001
fDate
12/1/2001 12:00:00 AM
Firstpage
2861
Lastpage
2869
Abstract
A one-dimensional (1-D) analytic solution is derived for an undoped (or lightly doped) double-gate (DG) MOSFET by incorporating only the mobile charge term in Poisson\´s equation. The solution is applied to both symmetric and asymmetric DG MOSFETs to obtain closed forms of band bending and inversion charge as a function of gate voltage and silicon thickness. It is shown that for the symmetric DG device, "volume inversion" only occurs under subthreshold conditions, with a slightly negative impact on performance. Comparisons under the same off-state conditions show that the on-state inversion charge density of an asymmetric DG with one channel is only slightly less than that of a symmetric DG with two channels, if the silicon film is thin. From the analytic solutions, explicit expressions for the various components of the equivalent capacitance circuit are derived for symmetric and asymmetric DG devices. These help gain an insight into the electrostatic coupling between the back gate and the front channel in the asymmetric case. Finally, the gate work function requirements are quantified for symmetric and asymmetric DG CMOS, based on threshold voltage considerations
Keywords
MOSFET; Poisson equation; capacitance; carrier density; equivalent circuits; inversion layers; semiconductor device models; work function; 1D analytic solution; Poisson equation; asymmetric double-gate MOSFETs; band bending; capacitance; charge carrier density; electrostatic coupling; equivalent capacitance circuit; gate work function requirements; inversion charge; mobile charge term; off-state conditions; on-state inversion charge density; silicon film thickness; subthreshold conditions; symmetric double-gate MOSFETs; threshold voltage; volume inversion; Capacitance; Charge carrier density; Coupling circuits; Electrostatics; MOS capacitors; MOSFETs; Poisson equations; Semiconductor films; Silicon; Threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.974719
Filename
974719
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