• DocumentCode
    1557597
  • Title

    Analytic solutions of charge and capacitance in symmetric and asymmetric double-gate MOSFETs

  • Author

    Taur, Yuan

  • Author_Institution
    IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
  • Volume
    48
  • Issue
    12
  • fYear
    2001
  • fDate
    12/1/2001 12:00:00 AM
  • Firstpage
    2861
  • Lastpage
    2869
  • Abstract
    A one-dimensional (1-D) analytic solution is derived for an undoped (or lightly doped) double-gate (DG) MOSFET by incorporating only the mobile charge term in Poisson\´s equation. The solution is applied to both symmetric and asymmetric DG MOSFETs to obtain closed forms of band bending and inversion charge as a function of gate voltage and silicon thickness. It is shown that for the symmetric DG device, "volume inversion" only occurs under subthreshold conditions, with a slightly negative impact on performance. Comparisons under the same off-state conditions show that the on-state inversion charge density of an asymmetric DG with one channel is only slightly less than that of a symmetric DG with two channels, if the silicon film is thin. From the analytic solutions, explicit expressions for the various components of the equivalent capacitance circuit are derived for symmetric and asymmetric DG devices. These help gain an insight into the electrostatic coupling between the back gate and the front channel in the asymmetric case. Finally, the gate work function requirements are quantified for symmetric and asymmetric DG CMOS, based on threshold voltage considerations
  • Keywords
    MOSFET; Poisson equation; capacitance; carrier density; equivalent circuits; inversion layers; semiconductor device models; work function; 1D analytic solution; Poisson equation; asymmetric double-gate MOSFETs; band bending; capacitance; charge carrier density; electrostatic coupling; equivalent capacitance circuit; gate work function requirements; inversion charge; mobile charge term; off-state conditions; on-state inversion charge density; silicon film thickness; subthreshold conditions; symmetric double-gate MOSFETs; threshold voltage; volume inversion; Capacitance; Charge carrier density; Coupling circuits; Electrostatics; MOS capacitors; MOSFETs; Poisson equations; Semiconductor films; Silicon; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.974719
  • Filename
    974719