SiC thin-film thermistors

Author

Nagai, Takeshi ; Itoh, Masahiko

Author_Institution

Matsushita Housing Products Co. Ltd., Nara, Japan

Volume

26

Issue

6

fYear

1990

Firstpage

1139

Lastpage

1143

Abstract

A thermistor using an RF-sputtered SiC film has been developed as a temperature sensor for cooking products. Since the SiC film has the advantage of being able to detect temperatures over the wide range of 0-500°C with a good thermal stability, the thermistor can be applied not only to a conventional oven but also to a pyrolytic self-cleaning oven. Since the thermistor can detect surface temperatures with a rapid thermal response by contacting physically with an outer surface of an object, it can be also applied to a surface cooking top. The construction, electrical properties, and forming method of the SiC thin-film thermistor and applications to cooking products are described

Keywords

electric sensing devices; ovens; semiconductor materials; silicon compounds; temperature measurement; thermistors; thin film devices; 0 to 500 degC; RF-sputtered SiC film; SiC film; cooking products; electrical properties; oven; pyrolytic self-cleaning oven; rapid thermal response; surface temperatures; temperature sensor; thermal stability; thin-film thermistors; Gas detectors; Home appliances; Ovens; Silicon carbide; Temperature dependence; Temperature distribution; Temperature sensors; Thermal stability; Thermistors; Transistors;

fLanguage

English

Journal_Title

Industry Applications, IEEE Transactions on

Publisher

ieee

ISSN

0093-9994

Type

jour

DOI

10.1109/28.62400

Filename

62400