Title :
Improvement in ammonia sensing characteristics of titanium dioxide(TiO2) thin film by palladium(Pd) doping
Author :
Mukhopadhyay, Amit K.
Author_Institution :
Dept. of Electron. & Telecommun. Eng., Jadavpur Univ., Kolkata, India
fDate :
Jan. 31 2014-Feb. 2 2014
Abstract :
A lot of reports are already available about how adding palladium to titanium dioxide improves its gas sensing abilities towards formaldehyde, ethanol, LPG, acetone and methane gases. However, not much has been reported about ammonia gas sensing using palladium doped titanium dioxide thin film. In this work, TiO2 and Pd doped TiO2 thin films have been deposited using DC magnetron sputtering. Thereafter, ammonia gas sensing characteristics of these films were investigated. In this paper, it has been shown that there results an improvement in the ammonia gas sensing characteristics of TiO2 thin film when it is doped with palladium.
Keywords :
ammonia; gas sensors; palladium; semiconductor doping; semiconductor thin films; titanium compounds; DC magnetron sputtering; NH3; TiO2:Pd; ammonia gas sensing characteristics; palladium doping; titanium dioxide thin film; Films; Gas detectors; Sensitivity; Temperature; Temperature measurement; Temperature sensors; AFM; SEM; XRD; adsorbs; dc magnetron system; donor vacancies; metal oxide semiconductors; optimum operating temperature; partial pressure; receptor function; sensitivity factor(SF); spillover; sputtering; transducer function;
Conference_Titel :
Control, Instrumentation, Energy and Communication (CIEC), 2014 International Conference on
Conference_Location :
Calcutta
DOI :
10.1109/CIEC.2014.6959056
