DocumentCode :
1558151
Title :
A novel approach for flip chip solder joint quality inspection: laser ultrasound and interferometric system
Author :
Liu, Sheng ; Erdahl, Dathan ; Ume, I. Charles ; Achari, Achyuta ; Gamalski, Juergen
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Volume :
24
Issue :
4
fYear :
2001
fDate :
12/1/2001 12:00:00 AM
Firstpage :
616
Lastpage :
624
Abstract :
A novel, noncontact, nondestructive approach for flip chip solder joint quality inspection is presented. In this technique, a pulsed laser generates ultrasound on the chip\´s surface, exciting the whole chip into a vibration motion. An interferometer was used to measure the vibration displacement of the chip\´s surface. Because changes in solder joint quality produce a different vibration response, a value, "error ratio," is used to measure the difference between a good chip and a chip with defects. An automatic signal-processing algorithm to calculate the error ratio was developed and implemented, as well as a frequency analysis algorithm. The inspection system was characterized, and results are presented for two cases of flip chips with missing solder balls. Results indicate that a laser ultrasonic/interferometeric system offers great promise for solder bump inspection in flip chip, BGA, chip scale, and micro BGA packages
Keywords :
ball grid arrays; chip scale packaging; flip-chip devices; inspection; integrated circuit testing; light interferometry; nondestructive testing; quality control; ultrasonic applications; BGA packages; automatic signal-processing algorithm; chip scale packages; error ratio; flip chip; frequency analysis algorithm; inspection system; laser interferometric system; laser ultrasound; micro BGA packages; nondestructive approach; pulsed laser; solder balls; solder bump inspection; solder joint quality inspection; vibration displacement; vibration motion; Displacement measurement; Flip chip; Flip chip solder joints; Inspection; Optical pulse generation; Semiconductor device measurement; Surface emitting lasers; Ultrasonic imaging; Ultrasonic variables measurement; Vibration measurement;
fLanguage :
English
Journal_Title :
Components and Packaging Technologies, IEEE Transactions on
Publisher :
ieee
ISSN :
1521-3331
Type :
jour
DOI :
10.1109/6144.974950
Filename :
974950
Link To Document :
بازگشت