Double-Layer Silicon Photonic Crystal Fiber-Tip Temperature Sensors

This letter describes the manufacture and performance of a monolithic double-layer silicon photonic crystal temperature sensor. The sensor is fabricated on standard silicon wafers using oxide passivation and a combination of isotropic and anisotropic etching, and mounted on the facet of a standard single-mode optical fiber using template-assisted epoxy bonding. The double-layer configuration leads to coupling of the guided resonances in the two photonic crystals and enables sharper resonances and consequently higher temperature sensitivity and better detection limit (0.011 °C) than the single-layer counterpart. We experimentally demonstrate that the sensor has a twofold increased temperature sensitivity in terms of reflectivity change at a fixed wavelength (-0.00576/°C), and report on electromagnetic simulations explaining the enhanced sensor operation. The photonic crystal fabrication method and template-assisted bonding enable batch-fabrication of the sensors. Their small size, robust construction, and fiber interface make the sensors promising for numerous applications, including sensing in harsh environments.