Title :
Laser trimming of SiON components for integrated optics
Author :
Gleine, Wolfgang ; Müller, Jörg
Author_Institution :
Tech. Univ. Hamburg, Germany
fDate :
11/1/1991 12:00:00 AM
Abstract :
Integrated optical directional couplers were realized by thin SiON films, deposited on silicon substrates by low pressure chemical vapor deposition (LPCVD). To reproduce a desired coupling ratio, a spatially selective trimming of integrated optical components was developed to compensate the technological deviations from ideal values of geometry and refractive index. Starting from the actual coupling ratio, any other value could be obtained by annealing the SiON material with a pulsed CO 2 laser beam within 3%, by reducing the refractive index of near oxide films
Keywords :
CVD coatings; directional couplers; integrated optics; laser beam machining; optical couplers; silicon compounds; LPCVD; Si substrate; coupling ratio; directional couplers; geometry; integrated optics; laser trimming; low pressure chemical vapor deposition; pulsed CO2 laser beam; refractive index; spatially selective trimming; thin SiON films; Chemical lasers; Directional couplers; Integrated optics; Optical coupling; Optical films; Optical refraction; Optical variables control; Pulsed laser deposition; Refractive index; Semiconductor films;
Journal_Title :
Lightwave Technology, Journal of
