Title :
High-voltage smart power integrated circuits to drive piezoceramic actuators for microrobotic applications
Author :
Montané, E. ; Miribel-Català, P. ; López-Sánchez, J. ; Puig-Vidal, M. ; Bota, S. ; Samitier, J.
Author_Institution :
Intrumentation & Comunication Syst., Barcelona Univ., Spain
fDate :
12/1/2001 12:00:00 AM
Abstract :
The development of microrobots is very important in fields where sub-micrometre precision is required. An integrated driving solution based on a commercial BCD (bipolar, CMOS, DMOS) technology is proposed to implement proper drivers for microrobots formed by smart piezoactuator units (SPU). The high voltage signals that demand these actuators are performed by a driver based on a full custom design of a high voltage operational amplifier connected in the inverter configuration. They are able to supply a 50 V sinusoidal waveform at frequencies ranging about 10 kHz with the distortion levels appropriate to the application
Keywords :
BIMOS integrated circuits; circuit stability; driver circuits; intelligent actuators; microactuators; microrobots; operational amplifiers; piezoceramics; piezoelectric actuators; power integrated circuits; 10 kHz; 50 V; HV operational amplifier; HV smart power integrated circuits; bipolar-CMOS-DMOS technology; commercial BCD technology; full custom design; high voltage opamp; high voltage signals; high-voltage smart power ICs; inverter configuration; microrobot drivers; microrobotic applications; piezoceramic actuators; sinusoidal waveform; smart piezoactuator units; sub-micrometre precision;
Journal_Title :
Circuits, Devices and Systems, IEE Proceedings -
DOI :
10.1049/ip-cds:20010712
