DocumentCode :
1559902
Title :
Acoustoelastic effect in stressed heterostructures
Author :
Osetrov, Alexander Vladimirovich ; Fröhlich, Heinz-Jürgen ; Koch, Reinhold ; Chilla, Eduard
Author_Institution :
St. Petersburg State Electrotechnical Univ., Russia
Volume :
49
Issue :
1
fYear :
2002
Firstpage :
94
Lastpage :
98
Abstract :
Mechanical stresses influence the phase velocity of acoustic waves, known as the AE (acoustoelastic) effect. In order to calculate the AE effect of biaxially stressed layered systems, we extended the transfer matrix method for acoustic wave propagation by considering the change of the density, the influence of residual stress, and the modification of the elastic stiffness tensor by residual strain and by third-order constants. The generalized method is applied to the calculation of the angular dispersion of the AE effect for transverse bulk modes and surface acoustic waves on Ge(001). Our calculations reveal that the AE effect significantly depends on the propagation direction and can even change sign. The maximal velocity change occurs for transversally polarized waves propagating parallel to the [110] direction. For the layered Ge/Si(001) system, the AE effect is investigated for Love modes propagating in the [100] and [110] directions. The AE effect increases rapidly with increasing layer thickness and almost reaches its maximal value when the wave still penetrates into the unstressed substrate
Keywords :
Love waves; acoustic dispersion; acoustic wave propagation; acoustic wave velocity; elastic constants; epitaxial layers; germanium; internal stresses; semiconductor epitaxial layers; surface acoustic waves; transfer function matrices; Ge; Ge-Si; Love modes; acoustic wave phase velocity; acoustic wave propagation; acoustoelastic effect; angular dispersion; biaxially stressed layered systems; density change; elastic stiffness tensor; heteroepitaxial systems; layered materials; maximal velocity change; nonlinear problem; penetration dependence; physical model; propagation direction; residual strain; residual stress; stressed cubic systems; stressed heterostructures; stresses influence; surface acoustic waves; transfer matrix method; transversally polarized waves; transverse bulk modes; Acoustic materials; Acoustic propagation; Acoustic waves; Capacitive sensors; Compressive stress; Lattices; Residual stresses; Substrates; Surface acoustic waves; Tensile stress;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.981387
Filename :
981387
Link To Document :
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