Title :
Errata to "High-cycle fatigue of single-crystal silicon thin films"
Author :
Muhlstein, Chirstopher L. ; Brown, Stuart B. ; Ritchie, Robert O.
Author_Institution :
University of California
Keywords :
Biographies; Fatigue; Laboratories; Materials science and technology; Mechanical engineering; Mechanical factors; Micromechanical devices; Physics; Semiconductor thin films; Silicon;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2002.982868
