• DocumentCode
    1560296
  • Title

    Errata to "High-cycle fatigue of single-crystal silicon thin films"

  • Author

    Muhlstein, Chirstopher L. ; Brown, Stuart B. ; Ritchie, Robert O.

  • Author_Institution
    University of California
  • Volume
    11
  • Issue
    1
  • fYear
    2002
  • Firstpage
    91
  • Lastpage
    91
  • Keywords
    Biographies; Fatigue; Laboratories; Materials science and technology; Mechanical engineering; Mechanical factors; Micromechanical devices; Physics; Semiconductor thin films; Silicon;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2002.982868
  • Filename
    982868
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1560296