Title :
Evaluation of MOS devices´ total dose response using the isochronal annealing method
Author :
Saigné, F. ; Dusseau, L. ; Fesquet, J. ; Gasiot, J. ; Ecoffet, R. ; Schrimpf, R.D. ; Galloway, K.F.
Author_Institution :
Lab. d´´Automatique et de Microelectronique, Univ. de Reims Champagne-Ardenne, France
fDate :
12/1/2001 12:00:00 AM
Abstract :
We irradiated and then annealed 4049 CMOS inverters from four different manufacturers using the isochronal annealing method. From one manufacturer to another, the experimental results show completely different device behavior during the annealing. From these results, the use of the isochronal annealing method to screen the devices on the basis of the failure risk is discussed. Moreover, we show how experimental isochronal annealing under bias can allow detection of the rebound effect in devices
Keywords :
CMOS integrated circuits; annealing; invertors; radiation effects; CMOS inverters; failure; isochronal annealing; rebound effect; total dose response; Annealing; Degradation; Electronic equipment; Inverters; MOS devices; Manufacturing; Qualifications; Temperature dependence; Testing; Time measurement;
Journal_Title :
Nuclear Science, IEEE Transactions on