Title :
Backside laser testing of ICs for SET sensitivity evaluation
Author :
Lewis, Dean ; Pouget, Vincent ; Beaudoin, Felix ; Perdu, Philippe ; Lapuyade, Herve ; Fouillat, Pascal ; Touboul, André
Author_Institution :
Lab. IXL, Univ. Bordeaux 1, Talence, France
fDate :
12/1/2001 12:00:00 AM
Abstract :
A new experimental approach combining backside laser testing and analog mapping is presented. A new technique for integrated circuits (ICs) backside preparation by laser ablation is evaluated. The methodology is applied to the study of single-event transient (SET) sensitivity on a linear IC
Keywords :
analogue integrated circuits; integrated circuit testing; ion beam effects; laser ablation; laser beam applications; micromachining; very high speed integrated circuits; ICs; SET sensitivity evaluation; analog mapping; backside laser testing; integrated circuits; laser ablation; linear IC; single-event transient sensitivity; Circuit testing; Integrated circuit metallization; Integrated circuit testing; Laser ablation; Laser beams; Laser modes; Optical propagation; Optical pulses; Surface emitting lasers; Very large scale integration;
Journal_Title :
Nuclear Science, IEEE Transactions on
