• DocumentCode
    1560494
  • Title

    Backside laser testing of ICs for SET sensitivity evaluation

  • Author

    Lewis, Dean ; Pouget, Vincent ; Beaudoin, Felix ; Perdu, Philippe ; Lapuyade, Herve ; Fouillat, Pascal ; Touboul, André

  • Author_Institution
    Lab. IXL, Univ. Bordeaux 1, Talence, France
  • Volume
    48
  • Issue
    6
  • fYear
    2001
  • fDate
    12/1/2001 12:00:00 AM
  • Firstpage
    2193
  • Lastpage
    2201
  • Abstract
    A new experimental approach combining backside laser testing and analog mapping is presented. A new technique for integrated circuits (ICs) backside preparation by laser ablation is evaluated. The methodology is applied to the study of single-event transient (SET) sensitivity on a linear IC
  • Keywords
    analogue integrated circuits; integrated circuit testing; ion beam effects; laser ablation; laser beam applications; micromachining; very high speed integrated circuits; ICs; SET sensitivity evaluation; analog mapping; backside laser testing; integrated circuits; laser ablation; linear IC; single-event transient sensitivity; Circuit testing; Integrated circuit metallization; Integrated circuit testing; Laser ablation; Laser beams; Laser modes; Optical propagation; Optical pulses; Surface emitting lasers; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/23.983195
  • Filename
    983195