Title :
High-field operation of submicrometer devices at atmospheric pressure
Author :
Madou, M.J. ; Morrison, S.R.
Author_Institution :
Teknekron Sensor Dev. Corp., Menlo Park, CA, USA
Abstract :
An array of micrometer-sized field emitter tips was used to produce ions in air or other gases at atmospheric pressure using only low voltages. The ions are produced by the dissociation of gaseous acids or bases in the high electric field near the tips. For example, with formic or acetic acid, ions are formed with the tip at about -50 V; with gaseous Lewis bases or with esters plus water vapor, ions are formed with the tip at either a positive or a negative potential. No ions are detected for alcohols, alkanes, acetone, water vapor, NO/sub 2/, oxygen, nitrogen, or argon.<>
Keywords :
electric sensing devices; field ionisation; ionisation of gases; ionisation of molecules; organic compounds; -50 V; 1 atm; Paschen curve; Si; acetic acid; air; atmospheric pressure; dissociation; esters; formic acid; gaseous Lewis bases; gaseous acids; high electric field; micrometer-sized field emitter tips; negative potential; positive potential; submicrometer devices; Atmosphere; Breakdown voltage; Electric breakdown; Electrodes; Electron emission; Field emitter arrays; Gases; Ionization; Low voltage; Sensor arrays;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148824
