Title :
Analogue characterization of horizontal bars capacitors for smart power applications
Author :
Ning, Zhenqiu ; Delecourt, Henri-Xavier ; De Schepper, Luc ; Tack, Dimitri ; Desoete, Bart ; Gillon, Renaud
Author_Institution :
AMI Semicond. Belgium, Oudenaarde, Belgium
Abstract :
Horizontal bars capacitors are important for smart power technologies. To perform an analogue characterization of the capacitors at different temperatures and bias voltages, a novel technique based on CBCM has been developed. The unit capacitance, the temperature coefficients and the voltage linearity coefficients of the horizontal bars capacitors have been successfully extracted by the technique. The technique is proven with high resolution, high flexibility and low cost.
Keywords :
capacitance measurement; capacitors; semiconductor device models; analogue characterization; bias voltages; charge-based capacitance measurement; horizontal bars capacitors; smart power applications; temperature coefficients; voltage linearity coefficients; Bars; CMOS technology; Capacitance measurement; Dielectric measurements; Linearity; MIM capacitors; MOS capacitors; Power capacitors; Temperature; Voltage;
Conference_Titel :
Microelectronic Test Structures, 2006. ICMTS 2006. IEEE International Conference on
Print_ISBN :
1-4244-0167-4
DOI :
10.1109/ICMTS.2006.1614306
