Title :
Choice and fabrication of microspectrometer components
Author :
Zhang, Chengmei ; Mei, Tao ; Kong, Deyi
Author_Institution :
Inst. of Intelligent Machines, Chinese Acad. of Sci., Hefei, China
Abstract :
Spectrometers are basically composed of three components: (1) dispersive element; (2) detectors and (3) optical path. There are many ways to realize them. By analysis and comparison the optimal choice and fabrication process of the three components in microspectrometer is described. The choice of components must be considered overall from performance, complexity of fabrication and dimension scale of the full microspectrometer systems.
Keywords :
CCD image sensors; Fabry-Perot interferometers; diffraction gratings; infrared detectors; infrared spectrometers; micro-optics; microlenses; optical fabrication; visible spectrometers; CCD image sensors; Fabry-Perot interferometers; detectors; diffraction gratings; dispersive element; fabrication process; microlenses; microspectrometer components; optical path; sputter etching; Biomedical optical imaging; Dispersion; Electron beams; Gratings; Lenses; Optical arrays; Optical device fabrication; Optical devices; Optical refraction; Spectroscopy;
Conference_Titel :
Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on
Print_ISBN :
0-7803-8273-0
DOI :
10.1109/WCICA.2004.1342211
