Photo-thermoelectric power generation for autonomous microsystems

Author

Baglio, S. ; Castorina, S. ; Fortuna, L. ; Savalli, N.

Author_Institution

Dipt. di Ingegneria Elettrica Elettronica e dei Sistemi, Catania Univ., Italy

Volume

4

fYear

2003

Abstract

This work deals with the feasibility study, the modeling and the design of an integrated photo-thermoelectric micro generator for autonomous microsystems. In particular each single part of such an autonomous system, composed by moving elements, and energy supply system has been just developed by the authors, taking into account a standard CMOS technology and suitable micro-machining compatible processes. Micro lenses have been used to achieve high efficiency for the thermoelectric conversion. The discussed work expands our photo-thermomechanical actuation strategy and allows to further enhance the device efficiency.

Keywords

CMOS integrated circuits; microlenses; micromechanical devices; photothermal conversion; thermoelectric conversion; CMOS technology; autonomous microsystem; energy supply system; integrated photo-thermoelectric power generation; microlens; micromachining process; thermoelectric conversion efficiency; Actuators; Batteries; CMOS technology; Lenses; Light sources; Microelectronics; Power generation; Power system modeling; Thermoelectricity; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on

Print_ISBN

0-7803-7761-3

Type

conf

DOI

10.1109/ISCAS.2003.1206292

Filename

1206292