Title :
Photo-thermoelectric power generation for autonomous microsystems
Author :
Baglio, S. ; Castorina, S. ; Fortuna, L. ; Savalli, N.
Author_Institution :
Dipt. di Ingegneria Elettrica Elettronica e dei Sistemi, Catania Univ., Italy
Abstract :
This work deals with the feasibility study, the modeling and the design of an integrated photo-thermoelectric micro generator for autonomous microsystems. In particular each single part of such an autonomous system, composed by moving elements, and energy supply system has been just developed by the authors, taking into account a standard CMOS technology and suitable micro-machining compatible processes. Micro lenses have been used to achieve high efficiency for the thermoelectric conversion. The discussed work expands our photo-thermomechanical actuation strategy and allows to further enhance the device efficiency.
Keywords :
CMOS integrated circuits; microlenses; micromechanical devices; photothermal conversion; thermoelectric conversion; CMOS technology; autonomous microsystem; energy supply system; integrated photo-thermoelectric power generation; microlens; micromachining process; thermoelectric conversion efficiency; Actuators; Batteries; CMOS technology; Lenses; Light sources; Microelectronics; Power generation; Power system modeling; Thermoelectricity; Wires;
Conference_Titel :
Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
Print_ISBN :
0-7803-7761-3
DOI :
10.1109/ISCAS.2003.1206292
