A novel field emission array pressure sensor

Simulation and preliminary experimental results are presented on the performance of field emission arrays designed for application in novel pressure sensors. Both cone-shaped and wedge-shaped emitter arrays are studied. A method to take into consideration the nonuniformity of array tips, an inevitable result of the fabrication process, is discussed. Various wet and dry-etching techniques of forming emitter arrays are compared. A combined wet/dry fabrication process is developed to achieve array/uniformity and reproducibility. The analysis indicates that the wedge-shaped emitter has a higher sensitivity to the change of tip-collector distance but must have a very small tip radius to get a sizable current; on the other hand, the cone-shaped emitter exhibits a stable output current to the variation of tip-collector distance and is suitable for the design of flat screen display.<>