Micromachined silicon cantilevers and tips for bidirectional force microscopy

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. The layout dimension and the etching parameters have to be optimized as a function of the feedback obtained from the measurements with these structures in the AFM (atomic force microscope). Moreover, sharp tips with a high aspect ratio could be demonstrated. The method described can also be used to fabricate high aspect ratio cantilevers with an integrated tip, which is even easier than fabricating the tip on a square cross section.<>