DocumentCode
1563002
Title
Thin film PIN photodiodes for optoelectronic silicon on sapphire CMOS
Author
Apsel, A. ; Culurciello, E. ; Andreou, A.G. ; Aliberti, K.
Author_Institution
Cornell Univ., Ithaca, NY, USA
Volume
4
fYear
2003
Abstract
In this paper, we consider both the utility of SOS substrates as a vehicle for optoelectronic packaging and the high speed silicon photodiodes available on a commercial SOS process. We show optical responses for six configurations of PIN photodiodes designed in this process. Our results indicate that photodiodes native to this process will operate at better than gigabit rates and produce signals over a range of visible wavelengths.
Keywords
CMOS integrated circuits; integrated circuit packaging; p-i-n photodiodes; sapphire; silicon-on-insulator; CMOS technology; SOS substrate; Si-Al2O3; high-speed silicon thin film PIN photodiode; optoelectronic packaging; High speed optical techniques; Optical design; Optical films; PIN photodiodes; Packaging; Process design; Semiconductor thin films; Silicon; Substrates; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
Print_ISBN
0-7803-7761-3
Type
conf
DOI
10.1109/ISCAS.2003.1206368
Filename
1206368
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