Title :
Thin film PIN photodiodes for optoelectronic silicon on sapphire CMOS
Author :
Apsel, A. ; Culurciello, E. ; Andreou, A.G. ; Aliberti, K.
Author_Institution :
Cornell Univ., Ithaca, NY, USA
Abstract :
In this paper, we consider both the utility of SOS substrates as a vehicle for optoelectronic packaging and the high speed silicon photodiodes available on a commercial SOS process. We show optical responses for six configurations of PIN photodiodes designed in this process. Our results indicate that photodiodes native to this process will operate at better than gigabit rates and produce signals over a range of visible wavelengths.
Keywords :
CMOS integrated circuits; integrated circuit packaging; p-i-n photodiodes; sapphire; silicon-on-insulator; CMOS technology; SOS substrate; Si-Al2O3; high-speed silicon thin film PIN photodiode; optoelectronic packaging; High speed optical techniques; Optical design; Optical films; PIN photodiodes; Packaging; Process design; Semiconductor thin films; Silicon; Substrates; Vehicles;
Conference_Titel :
Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on
Print_ISBN :
0-7803-7761-3
DOI :
10.1109/ISCAS.2003.1206368
