Title :
Electrochemical formation of through thickness anodic alumina structures with embedded aluminum elements
Author :
Shimanovich, D.L.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
Abstract :
Technological features for the formation of free anodic nanoporous Al2O3 structures and 5-100 μm thick embedded aluminum elements simultaneously by a two-sided through thickness electrochemical anodization were studied. It was proved that the thickness of the free alumina plate, the distribution and sizes of the interconnection system in its volume were varied by technological conditions.
Keywords :
alumina; electroforming; interconnections; nanofabrication; nanoporous materials; Al2O3; embedded aluminum elements; free alumina plate thickness; free anodic nanoporous alumina structure formation; interconnection system distribution; interconnection system sizes; size 5 mum to 100 mum; technological conditions; through thickness anodic alumina structures; two-sided through thickness electrochemical anodization;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959582
