• DocumentCode
    156348
  • Title

    Anisotropy and frequency dependence determination of relative dielectric constant for sapphire and silicon carbide substrates

  • Author

    Torkhov, N.A. ; Salnikov, A.S. ; Minin, O.N. ; Kupreychik, A.F. ; Babak, L.I. ; Bozhkov, V.G.

  • Author_Institution
    Sci.- Res. Inst. of Semicond. Devices, Tomsk, Russia
  • fYear
    2014
  • fDate
    7-13 Sept. 2014
  • Firstpage
    684
  • Lastpage
    685
  • Abstract
    Study results of frequency properties of sapphire and 4H-SiC{0001} silicon carbide substrate show availability of anisotropy and dispersion of effective dielectric constant ε(f). In both cases a value of ε(f) decreases with frequency f increasing. For a sapphire substrate the dispersion (ε(f=3.3 GHz)=9.32 and ε(f=37.6GHz)=8.62) is 7.5 percent, anisotropy is lesser than 0.5 percent. For 4H-SiC substrates a maximum value of dispersion (ε(f=3.47 GHz)=8.34 and ε(f=46.63 GHz)=7.77) is 6.8 percent, and anisotropy is 2.8 percent.
  • Keywords
    permittivity; sapphire; silicon compounds; wide band gap semiconductors; SiC; anisotropy; frequency dependence determination; relative dielectric constant; sapphire substrates; silicon carbide substrates; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-966-335-412-5
  • Type

    conf

  • DOI
    10.1109/CRMICO.2014.6959584
  • Filename
    6959584