Title :
Nano-scale mechanical test of MEMS structures by atomic force microscope
Author :
Fok, L.M. ; Fung, Carmen K M ; Liu, Y.H. ; Li, Wen
Author_Institution :
Robot Control Lab., Chinese Univ. of Hong Kong, China
Abstract :
This paper focuses on the nano-scale analysis of the mechanical properties of polymer and carbon nanotubes (CNT) embedded MEMS devices using the probe tip of the atomic force microscope (AFM).The mechanical properties of the surfaces of layered materials were investigated by using nanoindentation produced with the tips of an AFM. Experiment results indicated the bending characteristics of the device and also the Young´s modulus of the CNT embedded micro structure. Our objective was to determine the nano-scale mechanical properties and piezoresistivity of bulk carbon nanotubes using the local probe manipulation.
Keywords :
Young´s modulus; atomic force microscopy; bending; carbon nanotubes; crystal microstructure; electrical resistivity; indentation; mechanical testing; microhardness; microsensors; nanotube devices; piezoelectric devices; polymer films; AFM; MEMS structures; Young modulus; atomic force microscopy; bending; carbon nanotubes embedded MEMS devices; carbon nanotubes embedded microstructure; local probe manipulation; nanoindentation; nanoscale analysis; nanoscale mechanical properties; nanoscale mechanical test; piezoresistivity; polymer; probe tip; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Mechanical factors; Microelectromechanical devices; Micromechanical devices; Nanoscale devices; Polymers; Probes; Testing;
Conference_Titel :
Intelligent Control and Automation, 2004. WCICA 2004. Fifth World Congress on
Print_ISBN :
0-7803-8273-0
DOI :
10.1109/WCICA.2004.1342386
