Reflectometry dyagnostics of diffuse inhomogeneities in multilayer periodic structures

A new approach in frameworks of the dual regularization method is proposed in the solution of the reflectometry inverse problem to retrieve profiles of diffuse inhomogeneities in multilayer periodic epitaxy nanostructures by multifrequency measurements of power reflection coefficient. To compensate the absence of phase information in input data, the a priori information about the belonging of the desired solution to a compact set of functions is involved in the proposed algorithm.