Influence of residual gas pressure and ion implantation on the properties of nitride high-entropy alloys (TiZrAlYNb)N

Author

Yakushchenko, I.V. ; Sobol, O.V. ; Beresnev, V.M. ; Kupshishin, A.I. ; Bondar, O.V. ; Amekura, H. ; Kono, Kenji ; Oyoshi, K. ; Takeda, Y. ; Lisovenko, M.O.

Author_Institution

Sumy State Univ., Sumy, Ukraine

fYear

2014

fDate

7-13 Sept. 2014

Firstpage

744

Lastpage

745

Abstract

Using methods of electronic and atomic-force microscopy, energy-dispersive analysis, laser scanning microscopy, X-ray diffraction, hardness measurements the nitrides of high-entropy alloys (TiZrAlYNb)N, obtained by cathodic-vacuum-arc-vapor-deposition, were investigated. Influence of residual gas pressure on the properties of investigated nitrides was found. In addition, comparison of structure and phase analysis of investigated coatings before and after ion implantation of the heavy negative charged Au- was conducted.

Keywords

X-ray chemical analysis; X-ray diffraction; aluminium compounds; atomic force microscopy; electron microscopy; hardness; ion implantation; niobium compounds; optical microscopy; titanium compounds; vacuum deposited coatings; vacuum deposition; yttrium compounds; zirconium compounds; (TiZrAlYNb)N; AFM; X-ray diffraction; XRD; atomic-force microscopy; cathodic-vacuum-arc-vapor-deposition; coating phase analysis; electron microscopy; energy-dispersive analysis; hardness measurements; heavy negative charged gold ion; ion implantation; laser scanning microscopy; nitride high-entropy alloy properties; residual gas pressure; Artificial intelligence; Niobium; X-ray scattering; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference

Conference_Location

Sevastopol

Print_ISBN

978-966-335-412-5

Type

conf

DOI

10.1109/CRMICO.2014.6959613

Filename

6959613