Title :
The distribution analysis for elements in depth of nitride coating based on high-entropy Ti-Hf-V-Nb-Zr alloy
Author :
Bagdasaryan, A.A. ; Konarski, P. ; Misnik, M. ; Komarov, F.F.
Author_Institution :
Sumy State Univ., Sumy, Ukraine
Abstract :
The element-structural analysis of the nitride coatings obtained by vacuum arc evaporation from high-entropy cathodes of Ti-Hf-V-Nb-Zr was carried out. The use of complementary methods of elemental analysis (RBS, SIMS and GDMS) allowed making a comprehensive analysis of the elemental composition of the investigated coating, namely determining the elemental composition of the surface layer, identifying the uncontrolled impurities (O, C), as well as the changes in the concentration of elements with depth.
Keywords :
Rutherford backscattering; hafnium compounds; niobium compounds; secondary ion mass spectra; titanium compounds; vacuum deposited coatings; vacuum deposition; vanadium compounds; zirconium compounds; (TiHfVNbZr)N; GDMS; RBS; SIMS; distribution analysis; element concentration; element-structural analysis; elemental composition analysis; high-entropy Ti-Hf-V-Nb-Zr alloy; high-entropy cathodes; nitride coating depth; surface layer; uncontrolled impurities; vacuum arc evaporation; Niobium;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959628
