• DocumentCode
    1564809
  • Title

    Optimizing Yield and Wafer Fab Productivity through Yield Sensitive Dispatch

  • Author

    Dries, Aaron H. ; Krott, Loren C. ; Doxsey, John C.

  • Author_Institution
    Nat. Semicond. Corp., South Portland, ME
  • fYear
    2008
  • Firstpage
    318
  • Lastpage
    321
  • Abstract
    Wafer fabrication facilities are under increasing pressure to lower costs while maintaining high yields. This becomes difficult when producing both large and small die on the same equipment. Yielding small die is not a challenge, unlike larger die cannot yield well with high tool particulate levels. To accomplish this, an automated approach to dispatching factory work in progress (WIP) should account for tool and product yield variables. The resulting yield sensitive dispatch maintains high yield across all products while enhancing fab productivity and keeping costs down.
  • Keywords
    optimised production technology; optimised production technology; wafer fabrication productivity; work in progress; yield sensitive dispatch; Cost function; Design optimization; Dispatching; Fabrication; Manufacturing automation; Metrology; Process control; Production facilities; Productivity; Yield estimation; Flexible manufacturing systems; Manufacturing automation; Production management; Yield estimation; Yield optimization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference, 2008. ASMC 2008. IEEE/SEMI
  • Conference_Location
    Cambridge, MA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-1964-7
  • Electronic_ISBN
    1078-8743
  • Type

    conf

  • DOI
    10.1109/ASMC.2008.4529061
  • Filename
    4529061