Capacitor structures on the basis of strontium titanate films

Author

Sohrabi, Anaraki H. ; Gaponenko, N.V. ; Rudenko, M.V. ; Zavadskij, S.M. ; Golosov, D.A. ; Kolos, V.V. ; Petlitskij, N.A. ; Turtsevich, A.S.

Author_Institution

Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus

fYear

2014

fDate

7-13 Sept. 2014

Firstpage

819

Lastpage

820

Abstract

Thin layers of strontium titanate have been synthesized with sol-gel method. The strontium titanate phase is registered with X-ray diffraction analysis. The thickness of the strontium titanate xerogel films deposited by a spin-on technique is in the range of 200-280 nm for 5 and 6 layers. The properties of capacitors´ structures on the basis of SrTiO₃ xerogels in relation to morphology are discussed. The values of the dielectric constant and the lose factor are found to be 186 and 0.08, respectively, for the frequency of 1 MHz.

Keywords

X-ray diffraction; aerogels; dielectric losses; sol-gel processing; strontium compounds; thin film capacitors; SrTiO₃; X-ray diffraction analysis; capacitor structure; dielectric constant; frequency 1 MHz; lose factor; size 200 nm to 280 nm; sol-gel method; spin-on technique; strontium titanate xerogel film; Europe; Silicon; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference

Conference_Location

Sevastopol

Print_ISBN

978-966-335-412-5

Type

conf

DOI

10.1109/CRMICO.2014.6959647

Filename

6959647