Title :
CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration capability
Author :
Schoneberg, U. ; Schnatz, F.V. ; Brockherde, W. ; Kopystynski, P. ; Mehlhorn, T. ; Obermeier, E. ; Benzel, H.
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst. Duisburg, Germany
Abstract :
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning is introduced. It features differential generation and treatment of pressure-induced capacitance changes to suppress various parasitic effects. A digital calibration capability is provided in the form of a programmable capacitor array. The fabrication of the transducer is largely congruent with a standard n-well CMOS process. The authors explain the functioning of the circuitry and its implications for the sensor design and present experimental results obtained in testing the various components of the transducer.<>
Keywords :
CMOS integrated circuits; calibration; electric sensing devices; pressure transducers; switched capacitor networks; CMOS integrated; capacitive pressure transducer; differential generation; digital calibration capability; on-chip electronics; on-chip signal conditioning; programmable capacitor array; sensor design; switched-capacitor circuitry; Calibration; Capacitive sensors; Circuit testing; Equations; Photonic band gap; Sensor phenomena and characterization; Switched capacitor circuits; Switching circuits; Transducers; Zero voltage switching;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148869