DocumentCode
1565074
Title
Design considerations of a digital pressure sensor array
Author
Bower, R.W. ; Ismail, M.S.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., California Univ., Davis, CA, USA
fYear
1991
Firstpage
312
Lastpage
314
Abstract
A digital pressure sensor array is described which is designed using aligned wafer bonding. The array produces a digital output describing the pressure differential range in the interval of 0.25 to 1.0 atmospheres of pressure. The digital pressure sensors operate on the principle of closing electrical contacts at desired pressure points.<>
Keywords
digital integrated circuits; electric sensing devices; monolithic integrated circuits; pressure transducers; 0.25 to 1 atm; aligned wafer bonding; closing electrical contacts; design; digital output; digital pressure sensor array; pressure differential range; Atmosphere; Biomembranes; Contacts; Geometry; Poisson equations; Sensor arrays; Sensor phenomena and characterization; Silicon; Switches; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.148871
Filename
148871
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