Title :
Design considerations of a digital pressure sensor array
Author :
Bower, R.W. ; Ismail, M.S.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Davis, CA, USA
Abstract :
A digital pressure sensor array is described which is designed using aligned wafer bonding. The array produces a digital output describing the pressure differential range in the interval of 0.25 to 1.0 atmospheres of pressure. The digital pressure sensors operate on the principle of closing electrical contacts at desired pressure points.<>
Keywords :
digital integrated circuits; electric sensing devices; monolithic integrated circuits; pressure transducers; 0.25 to 1 atm; aligned wafer bonding; closing electrical contacts; design; digital output; digital pressure sensor array; pressure differential range; Atmosphere; Biomembranes; Contacts; Geometry; Poisson equations; Sensor arrays; Sensor phenomena and characterization; Silicon; Switches; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148871
