Title :
Megasonic Cleaning of Blanket and Patterned Samples in Carbonated Ammonia Solutions for Enhanced Particle Removal and Reduced Feature Damage
Author :
Zhenxing Han ; Keswani, Manish ; Raghavan, Srinath
Author_Institution :
Dept. of Chem. & Environ. Eng., Univ. of Arizona, Tucson, AZ, USA
Abstract :
An investigation of particle removal efficiency and feature damage has been conducted in NH4OH/NH4HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2 - 8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4OH and NH4OH/NH4HCO3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.
Keywords :
ammonia; carbon compounds; cavitation; sonoluminescence; surface cleaning; CO2; NH4OH; NH4OH-NH4HCO3; alkaline solutions; aqueous CO2; carbonated ammonia cleaning solutions; feature damage; megasonic energy; particle removal efficiency; sonoluminescence data; transient cavitation; ${rm CO}_2$ (aq.); Megasonic cleaning; feature damage; particle removal efficiency (PRE); sonoluminescence (SL);
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2271641
