Title :
Microwave resonator measuring converter in the diagnosis of semiconductor plates
Author :
Polietaiev, D.A. ; Starostenko, V.V. ; Shadrin, A.A.
Author_Institution :
Tavrida Nat. Univ., Simferopol, Russia
Abstract :
Electrodynamic characteristics of the resonator measuring converter that used for the diagnosis of semiconductor structures are theoretically identified. The analysis of basic geometric parameters, that determines the characteristics of the probe and its sensitivity, is conducted.
Keywords :
convertors; electrodynamics; microwave resonators; plates (structures); probes; semiconductor devices; geometric parameter analysis; microwave resonator measuring converter electrodynamic characteristics; probe characteristics; probe sensitivity; semiconductor plate structure diagnosis; Logic gates;
Conference_Titel :
Microwave & Telecommunication Technology (CriMiCo), 2014 24th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-966-335-412-5
DOI :
10.1109/CRMICO.2014.6959691
