Title :
Common two lead wires sensing system
Author :
Esashi, M. ; Matsumoto, Y.
Author_Institution :
Dept. of Precision Eng., Tohoku Univ., Sendai, Japan
Abstract :
Sensing systems with many sensors connected to common two lead wires were studied. Two lead wires were used not only for supplying power but also for reading out the sensing signal and for accessing one of the connected sensors. Integrated circuits for addressing and integrated capacitance pressure sensors were developed for the system. The addressing unit was fabricated as a CMOS chip. Two types of sensing units for capacitive sensors were studied. A single capacitor type was fabricated as an integrated capacitive pressure sensor. A differential capacitor type was designed and the operation was verified with circuit simulation.<>
Keywords :
CMOS integrated circuits; capacitance measurement; electric sensing devices; pressure measurement; pressure transducers; CMOS chip; addressing; common two lead wire system; differential capacitor; integrated capacitance pressure sensors; sensor array; Capacitive sensors; Circuits; Clocks; Current supplies; Frequency; Inverters; Power supplies; Temperature sensors; Voltage; Wires;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148876