Title :
Micromachined Clark oxygen electrode
Author :
Suzuki, H. ; Kojima, N. ; Sugama, A. ; Fujita, S.
Author_Institution :
Fujitsu Lab., Atsugi, Japan
Abstract :
A miniature Clark oxygen electrode was fabricated using micromachining. A glass substrate with gold working, counter, and Ag/AgCl reference electrodes was anodically bonded to a silicon substrate having anisotropically etched grooves to make small cavities for accommodating an electrolyte solution. FEP was used for the gas-permeable membrane, and it adhered thermally to the substrate. The 90% response time average 2.6 min and a good linear calibration curve was obtained. Improving FEP membrane adhesion made the oxygen electrode able to tolerate sterilization by steam.<>
Keywords :
chemical variables measurement; electric sensing devices; electrochemical electrodes; gas sensors; membranes; oxygen; Ag-AgCl; KCl-HCl; O/sub 2/ electrode; O/sub 2/ permeable membrane; Pyrex substrate; Si; anisotropically etched grooves; bonding; electrochemical sensor; etching; gas-permeable membrane; glass substrate; linear calibration curve; micromachining; miniature Clark oxygen electrode; sterilization; Anisotropic magnetoresistance; Biomembranes; Bonding; Counting circuits; Electrodes; Etching; Glass; Gold; Micromachining; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148879
