Author :
Kim, Dong-Joo ; Shen, Dongna ; Park, Jung-Hyun ; Ajitsaria, Jyoti ; Choe, Song-Yul
Author_Institution :
Materials Research and Education Center, Auburn University, AL 36849, USA
Abstract :
A MEMS piezoelectric power harvesting device, a unimorph PZT cantilever and arrays with an integrated Si proof mass was designed. Pt/PZT/Pt/Ti/SiO2 multilayered films were deposited on Si or SOI substrates and then the cantilevers were patterned and released by inductively coupled plasma (ICP) reactive ion etching (RIE). The fabricated devices demonstrate that the monolithic device (mono-cantilever beam) can produce around 2 – 4 μ W at 1-g condition corresponding to 1000 – 4000 μ W/cm3. The typical current generated from such device ranges around 5 – 10 μ A. The array consisting of 10 cantilever beams was able to demonstrate about 12 μ W power generation comprising of 120 μ A and 100 mV.
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4688141
