• DocumentCode
    1566118
  • Title

    EH004

  • Author

    Kim, Dong-Joo ; Shen, Dongna ; Park, Jung-Hyun ; Ajitsaria, Jyoti ; Choe, Song-Yul

  • Author_Institution
    Materials Research and Education Center, Auburn University, AL 36849, USA
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A MEMS piezoelectric power harvesting device, a unimorph PZT cantilever and arrays with an integrated Si proof mass was designed. Pt/PZT/Pt/Ti/SiO2 multilayered films were deposited on Si or SOI substrates and then the cantilevers were patterned and released by inductively coupled plasma (ICP) reactive ion etching (RIE). The fabricated devices demonstrate that the monolithic device (mono-cantilever beam) can produce around 2 – 4 μ W at 1-g condition corresponding to 1000 – 4000 μ W/cm3. The typical current generated from such device ranges around 5 – 10 μ A. The array consisting of 10 cantilever beams was able to demonstrate about 12 μ W power generation comprising of 120 μ A and 100 mV.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4688141
  • Filename
    4688141
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1566118