DocumentCode
1566133
Title
Thin film piezoelectric dual-stage actuator for HDD
Author
Kuwajima, R. ; Matsuoka, K.
Author_Institution
HD Dev. Center, Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
fYear
2002
Abstract
Summary form only given. A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives (HDDs) was proposed and developed. This dual-stage actuator device is characterized by applying the sputter-deposited thin film PZT, instead of the previously proposed bulk type actuator (Y. Soeno et al., IEEE Trans. Magn., vol. 35, pp. 983-987, 1999).
Keywords
disc drives; hard discs; lead compounds; magnetic heads; piezoelectric actuators; position control; sputtered coatings; HDD; PZT; PZT sputter-deposited thin film; PbZrO3TiO3; bulk type actuator; high-density hard disk drives; magnetic head positioning; thin film piezoelectric dual-stage actuator; Filters; Frequency; Hard disks; Magnetic films; Magnetic heads; Microactuators; Open loop systems; Piezoelectric actuators; Sputtering; Transient response;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
0-7803-7365-0
Type
conf
DOI
10.1109/INTMAG.2002.1000876
Filename
1000876
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