Title :
Transparent conducting oxide development for electronics applications
Author :
Perkins, J.D. ; Berry, J. J. ; van Hest, Maikel F. A. M. ; Cavendor, A.N. ; Leenheer, Andrew J. ; O´Hayre, R.P. ; Ginley, D.S.
Author_Institution :
National Renewable Energy Laboratory, Golden, CO, 80401, USA
Abstract :
We have employed both combinatorial composition spread and conventional single composition approaches to determine the relative roles of metals and oxygen stoichiometries on the opto-electronic properties of amorphous In-Zn-O (a-IZO) thin film transparent conductors. Two major results were found. First, that the optimization of conductivity in a-IZO is a coupled process with the best metals composition depending upon the oxygen content of the sputter gas. Second, that the electron mobility as a function of carrier concentration is given by a common curve for all a-IZO films independent of the metals composition.
Keywords :
Amorphous materials; Conductive films; Conductivity; Electrical resistance measurement; Electromagnetic wave absorption; Indium; Optical reflection; Sputtering; Substrates; Zinc oxide;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4688157
