Title :
Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems
Author :
Jerman, J.H. ; Clift, D.J.
Author_Institution :
IC Sensors, Milpitas, CA, USA
Abstract :
The techniques of silicon micromachining have been used to fabricate a second-generation Fabry-Perot interferometer for use in the near-infrared spectral region. These devices provide a sharp optical transmission peak which can be used as wavelength division demultiplexers in optical fiber communications systems. The wavelength tuning and parallelism control of the mirror elements are achieved electrostatically, by varying the voltage between control electrodes. This second-generation device includes a thin, etch-stopped corrugated diaphragm as the suspension for the movable element.<>
Keywords :
elemental semiconductors; fibre optics; frequency division multiplexing; integrated circuit technology; light interferometers; silicon; control electrodes; etch-stopped corrugated diaphragm; micromachining; miniature interferometer; mirror elements; movable element; near-infrared; optical fiber WDM; optical fiber communications; parallelism control; second-generation Fabry-Perot interferometer; second-generation device; suspension; tunable laser source; wavelength division demultiplexers; wavelength tuning; Communication system control; Fabry-Perot interferometers; Micromachining; Mirrors; Optical devices; Optical fiber communication; Optical interferometry; Optical tuning; Silicon; Voltage control;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148888
