Title :
High resolution analog interface for micromachined capacitive accelerometer
Author :
Aaltonen, Lasse ; Rahikkala, Pasi ; Saukoski, Mikko ; Halonen, Kari
Author_Institution :
Electron. Circuit Design Lab., Helsinki Univ. of Technol., Helsinki
Abstract :
A continuous time analog accelerometer interface is feasible when high dynamic range together with wide signal band is required. This paper provides design data for a 120 dB accelerometer with signal band of 300 Hz. Circuit structures for an integrated interface will be presented and important sources of instabilities discussed. Measured and simulated results will be provided to support the theory.
Keywords :
accelerometers; micromechanical devices; micromachined capacitive accelerometer; time analog accelerometer interface; wide signal band; Accelerometers; Capacitive sensors; Circuit simulation; Feedback; Frequency; Linearity; Low pass filters; Operational amplifiers; Signal design; Signal resolution;
Conference_Titel :
Circuit Theory and Design, 2007. ECCTD 2007. 18th European Conference on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-1341-6
Electronic_ISBN :
978-1-4244-1342-3
DOI :
10.1109/ECCTD.2007.4529545
