Design and control of a micro-cantilever tool for micro-robot contact sensing

Author

Arbat, A. ; Canals, J. ; Casanova, R. ; Diéguez, A. ; Brufau, J. ; Puig, M. ; Samitier, J.

Author_Institution

Dept. d´´Electron., Univ. de Barcelona, Barcelona

fYear

2007

Firstpage

100

Lastpage

103

Abstract

This paper presents the electronics for the resonance control of a resonance contact sensor. The interface consists in an analog front-end and a digital control unit, fabricated in a CMOS standard technology of 0.13 mum from STM. The sensor is a SMART multi-layer piezo-polymer micro-cantilever working in resonance mode. The sensing is done using an electrical isolated piezo-layer of the microstructure. For the design of the electronics an electrical model of the sensor has been developed. The model is described in detail in the paper.

Keywords

cantilevers; microrobots; microsensors; CMOS standard technology; SMART multilayer piezo-polymer microcantilever; analog front-end; digital control unit; microcantilever tool control; microcantilever tool design; microrobot contact sensing; resonance contact sensor; resonance control; CMOS technology; Communication system control; Contacts; Intelligent sensors; Legged locomotion; Resonance; Resonant frequency; Robot sensing systems; Semiconductor device modeling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuit Theory and Design, 2007. ECCTD 2007. 18th European Conference on

Conference_Location

Seville

Print_ISBN

978-1-4244-1341-6

Electronic_ISBN

978-1-4244-1342-3

Type

conf

DOI

10.1109/ECCTD.2007.4529546

Filename

4529546