Title :
Design of MEMS electrometer for highly sensitive charge measurement
Author :
Li, Zhuang ; Lin, Bintao ; Chen, Chilai ; Kong, Deyi
Author_Institution :
Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei, China
Abstract :
A new scheme of MEMS vibrating reed electrometer is proposed, which has eliminated bias current leakage of preamplifiers. Its principle stays largely the same to Gunn´s largescale electrometer proposed in 1932, input Charge is shared between a variable capacitor formed by the vibrating reed and a fixed capacitor, charge is measured by detecting the AC image current caused by charge redistribution. Theoretical calculation showed a charge resolution of 286 electrons in 0.3 Hz bandwidth, showing some compromise between charge resolution and bias current leakage.
Keywords :
capacitors; charge measurement; electrometers; leakage currents; micromechanical devices; preamplifiers; vibrations; AC image current; MEMS; bandwidth 0.3 Hz; bias current leakage; charge redistribution; charge resolution; highly sensitive charge measurement; input charge; preamplifiers; variable capacitor; vibrating reed electrometer; Amplifiers; Capacitance; Capacitors; Charge measurement; Chromium; Current measurement; Electrodes; Micromechanical devices; Signal resolution; Voltage; MEMS electrometer; Vibrating reed electrometer; bias current;
Conference_Titel :
Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-3863-1
Electronic_ISBN :
978-1-4244-3864-8
DOI :
10.1109/ICEMI.2009.5274797
