High coercivity CoCrPt/Ti perpendicular media by in situ interdiffusion of CrMn ultra thin overlayers

Summary form only given. Several reports have been published on CoCrPt perpendicular media and the use of a Ti buffer layer. The challenge to improve coercivity and squareness of this type of media is still extensive. We have deposited Ti (x nm)/CoCrPt (30nm)/CrMn (y nm) films at different substrate temperatures for different x and y values. We have observed that (0001) texture of Ti is strongly dependent on substrate temperature and Ti thickness, which subsequently affects the texture of the CoCrPt layer. A Ti buffer layer thickness of 50nm and a substrate temperature of about 280/spl deg/C introduce the best texture in the CoCrPt layer. Introduction of a 3nm thick CrMn overlayer improves the coercivity of the film by more than two times. The magnetic and structural properties of the films with and without CrMn layer are discussed.