Piezoelectric thin film reliability for HDD dual-stage actuator

Author

Kuwajima, H. ; Uchiyama, Hiroyuki ; Ogawa, Y. ; Kita, Hajime ; Matsuoka, Koichi

Author_Institution

HD Dev. Center, Matsushita Electr. Ind. Co. Ltd., Osaka, Japan

fYear

2002

Abstract

Summary form only given. A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives (HDDs) was proposed and developed. This dual-stage actuator device is characterized by the sputter-deposited thin film PZT, featuring large displacement of 1.2 microns and high resonance frequency over 15 kHz. In this work, reliability against temperature, humidity, heat cycle, and mechanical shock was investigated to ensure the practical application to the drive products.

Keywords

disc drives; hard discs; magnetic heads; piezoelectric actuators; piezoelectric thin films; reliability; sputtered coatings; 1.2 micron; 15 kHz; HDD; PZT; PbZrO3TiO3; drive products; dual-stage actuator; heat cycle; high-density hard disk drives; humidity; magnetic head; mechanical shock; piezoelectric thin film; reliability; resonance frequency; sputter-deposited thin film; Hard disks; Humidity; Magnetic heads; Magnetic resonance; Piezoelectric actuators; Piezoelectric films; Resonant frequency; Sputtering; Temperature; Thin film devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Conference_Location

Amsterdam, The Netherlands

Print_ISBN

0-7803-7365-0

Type

conf

DOI

10.1109/INTMAG.2002.1001037

Filename

1001037