Title :
A MOSFET-only interface for integrated flow sensors
Author :
Huang, Qiuting ; Menolfi, Christaan ; Hammerschmied, Clemens
Author_Institution :
Integrated Syst. Lab., Swiss Federal Inst. of Technol., Zurich, Switzerland
Abstract :
Flow sensors can be constructed in a standard CMOS technology using thermopiles formed between metal and polysilicon. An on-chip interface circuit to such a flow sensor consists of a stabilized power driver, a low noise, low offset instrumentation amplifier, continuous-time lowpass and bandpass filters, as well as a 10-bit A/D converter. The MOSFET-only realization of these building blocks in the context of thermopile based sensors, is described in this contribution
Keywords :
CMOS analogue integrated circuits; driver circuits; flow measurement; flowmeters; instrumentation amplifiers; microsensors; preamplifiers; thermoelectric devices; thermopiles; 10 bit; A/D converter; ADC; CMOS technology; LNA; MOSFET-only interface; Si; continuous-time bandpass filters; continuous-time lowpass filters; integrated flow sensors; low noise amplifier; low offset instrumentation amplifier; onchip interface circuit; stabilized power driver; thermopiles; CMOS technology; Driver circuits; Heating; Instruments; Integrated circuit technology; Intelligent sensors; MOSFET circuits; Temperature dependence; Temperature sensors; Thermal sensors;
Conference_Titel :
Circuits and Systems, 1996. ISCAS '96., Connecting the World., 1996 IEEE International Symposium on
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-3073-0
DOI :
10.1109/ISCAS.1996.541979
