Title :
Performance of integrated inductors with CoTaZr and CoNbZr magnetic materials
Author :
Crawford, A.M. ; Wang, Shan X.
Abstract :
Summary form only given. The biggest challenge facing integration of magnetic material onto silicon is the compatibility of magnetics with standard silicon processing techniques. Integrated inductors were realized using ground planes of CoTaZr and CoNbZr (/spl rho/=100 /spl mu//spl Omega/cm). The magnetic properties of CoTaZr showed no change even after undergoing high temperature processing. Inductors with 1 /spl mu/m CoTaZr produced inductance values up to 60% higher than the air core inductors at frequencies to 1.4 GHz.
Keywords :
cobalt alloys; inductance; inductors; niobium alloys; semiconductor technology; soft magnetic materials; tantalum alloys; zirconium alloys; 1.4 GHz; 100 muohmcm; CoNbZr; CoTaZr; ground planes; high temperature processing; inductance; integrated inductors; magnetic materials; magnetic properties; standard Si processing techniques; Frequency; Inductance; Inductors; Linearity; Magnetic cores; Magnetic materials; Magnetic properties; Pulse transformers; Shape; Silicon;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001050
