Title :
Printing approaches to high performance backplane circuits
Author_Institution :
Univ. of Illinois, Urbana, IL
Abstract :
Ultrathin semiconductor elements - nanoribbons, nanomembranes and related structures - created directly from bulk semiconductor wafers represent a class of material that can be useful for unconventional electronic systems, such as flexible/stretchable circuits or those that cover large areas (i.e. macroelectronics). This paper reviews some of our recent work in this area, including the soft lithographic transfer printing approaches for integration. Various device examples are presented.
Keywords :
flexible electronics; nanoelectronics; nanolithography; nanostructured materials; soft lithography; bulk semiconductor wafers; flexible/stretchable circuits; high performance backplane circuits; macroelectronics; nanomembrane; nanoribbon; soft lithographic transfer printing approach; ultrathin semiconductor elements; unconventional electronic system; Backplanes; Circuits; Etching; Optical arrays; Plastics; Printing; Semiconductor materials; Silicon; Substrates; Thin film transistors;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688521
