Title :
Deposition of hard magnetic RE-Fe-B thin films by magnetron sputtering
Author :
Castaldi, L. ; Gibbs, M.R.J. ; Davies, H.A.
Author_Institution :
Dept. of Eng. Mater., Univ. of Sheffield, UK
Abstract :
Summary form only given. Rare earth-iron-boron thin film magnets prepared by sputtering are currently the subject of considerable interest, both for fundamental reasons and for possible applications in magnetic memories and in miniature electrical devices.
Keywords :
boron alloys; ferromagnetic materials; iron alloys; magnetic thin films; permanent magnets; rare earth alloys; sputtered coatings; hard magnetic RE-Fe-B thin films; magnetic memories; magnetron sputtering; miniature electrical devices; Garnet films; Iron; Magnetic devices; Magnetic films; Magnetic hysteresis; Magnetic resonance; Semiconductor thin films; Sputtering; Substrates; Temperature;
Conference_Titel :
Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
0-7803-7365-0
DOI :
10.1109/INTMAG.2002.1001072
