Title :
Semi-custom integrated silicon sensor development array
Author :
Haviland, J.S. ; Krahn, D.R. ; Johnson, W.J.
Author_Institution :
Honeywell Solid State Electron. Center, Plymouth, MN, USA
Abstract :
A silicon-based integrated circuit array is demonstrated with a unique layout and process technique which allows a shortened development and fabrication time and reduced design and development costs for several types of monolithically integrated smart sensors. This array utilizes the same semi-custom techniques which have allowed similar development time improvements and cost reductions for digital gate arrays and analog tile arrays, but is designed specifically for use with monolithic silicon sensors and actuators. This array is known as the Linear IC/Sensor Array, or LISA, and directly applies semi-custom design and processing techniques to monolithic smart sensor developments.<>
Keywords :
application specific integrated circuits; electric sensing devices; elemental semiconductors; monolithic integrated circuits; silicon; LISA; Linear IC/Sensor Array; Si sensors; elemental semiconductor; monolithic smart sensor developments; monolithically integrated smart sensors; semi-custom design; semi-custom techniques; Actuators; Costs; Fabrication; Integrated circuit layout; Intelligent sensors; Monolithic integrated circuits; Process design; Sensor arrays; Silicon; Tiles;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.148905
