Title :
Toward the potential of electrowetting microprisms: High performance liquids, low voltage dielectrics, and 3D lithography
Author :
Zhang, Jilin ; Hou, Linlin ; Smith, Neil R. ; Christy, Larry ; Heikenfeld, Jason C.
Author_Institution :
Novel Devices Lab., Univ. of Cincinnati, Cincinnati, OH
Abstract :
Electrowetting microprisms are projected to provide high performance for beam steering. To achieve this goal, high performance liquids, low voltage dielectrics, and 3D lithography are now in development. In this paper, we will review the operational basics of electrowetting microprisms, and the above-mentioned three key factors.
Keywords :
dielectric materials; lithography; micro-optics; oils; optical prisms; wetting; 3D lithography; beam steering; electrowetting micrprisms; high performance liquids; low voltage dielectrics; Beam steering; Contacts; Dielectric liquids; Equations; Lithography; Low voltage; Petroleum; Scanning electron microscopy; Surface tension; Viscosity;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688589
