Low-temperature fabrication of Ll/sub 0/ ordered FePt alloy with perpendicular anisotropy by alternate monatomic layer deposition

Summary form only given. Ll/sub 0/-type ordered FePt alloy with large magnetic anisotropy has attracted much attention in recent years, since it is a potential material for extensive applications such as ultrahigh density recording media and bias magnets in monolithic microwave integrated circuit. A lot of studies were performed for FePt alloy films obtained by conventional deposition techniques followed by appropriate heat treatment. It is well known, however, the growth temperature and/or the post annealing temperature are required to be high (usually more than 500/spl deg/C) for the preparation of highly ordered Fe-Pt alloy films. For practical use, it is essential to reduce the growth temperature. In this paper, we propose that the alternate monatomic layer deposition should be one of powerful methods for preparing Ll/sub 0/-type ordered Fe-Pt alloy films at reduced temperature.