• DocumentCode
    1569876
  • Title

    Silicon nanophotonic waveguide circuits and devices

  • Author

    Bogaerts, Wim ; Dumon, Pieter ; Selvaraja, Shankar Kumar ; Van Thourhout, Dries ; Baets, Roel

  • Author_Institution
    Dept. of Inf. Technol., IMEC - Ghent Univ., Ghent
  • fYear
    2008
  • Firstpage
    304
  • Lastpage
    305
  • Abstract
    Silicon on Insulator is an ideal platform for largescale nanophotonic integration. We show that tight process control is needed for well-functioning filters, and discuss a number of devices based on these filters.
  • Keywords
    elemental semiconductors; integrated optics; nanophotonics; optical filters; optical waveguides; silicon-on-insulator; Si; nanophotonic integration; silicon nanophotonic waveguide circuits; silicon on insulator; well-functional filters; Arrayed waveguide gratings; Circuits; Filters; Nanoscale devices; Optical ring resonators; Optical waveguides; Photonics; Process control; Silicon; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
  • Conference_Location
    Acapulco
  • Print_ISBN
    978-1-4244-1931-9
  • Electronic_ISBN
    978-1-4244-1932-6
  • Type

    conf

  • DOI
    10.1109/LEOS.2008.4688611
  • Filename
    4688611