Title :
Silicon nanophotonic waveguide circuits and devices
Author :
Bogaerts, Wim ; Dumon, Pieter ; Selvaraja, Shankar Kumar ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., IMEC - Ghent Univ., Ghent
Abstract :
Silicon on Insulator is an ideal platform for largescale nanophotonic integration. We show that tight process control is needed for well-functioning filters, and discuss a number of devices based on these filters.
Keywords :
elemental semiconductors; integrated optics; nanophotonics; optical filters; optical waveguides; silicon-on-insulator; Si; nanophotonic integration; silicon nanophotonic waveguide circuits; silicon on insulator; well-functional filters; Arrayed waveguide gratings; Circuits; Filters; Nanoscale devices; Optical ring resonators; Optical waveguides; Photonics; Process control; Silicon; Wires;
Conference_Titel :
IEEE Lasers and Electro-Optics Society, 2008. LEOS 2008. 21st Annual Meeting of the
Conference_Location :
Acapulco
Print_ISBN :
978-1-4244-1931-9
Electronic_ISBN :
978-1-4244-1932-6
DOI :
10.1109/LEOS.2008.4688611
