Title :
Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets
Author :
Tao, K. ; Ding, G. ; Wang, P. ; Yang, Z. ; Wang, Y.
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
This paper presents the fabrication and characterization of a novel fully integrated micro electromagnetic vibration energy harvester using micro-patterning of bonded magnets. The magnetic material utilized is a polymer composite, consisting of a commercially available NdFeB powder dispersed in epoxy resin to a weight loading percentage of 90%. The prototype is fabricated using UV-LIGA technology and microelectroplating technology. The whole volume of the structure is about 20 mm3. Testing results show that the fabricated vibration energy harvesters can generate a maximum peak-peak voltage of 20.9 μV at the device´s resonance frequency of 365 Hz and input acceleration of 1 g (9.8 m/s2).
Keywords :
LIGA; electroplating; energy harvesting; polymers; UV LIGA technology; bonded magnets; fully integrated microelectromagnetic vibration energy harvesters; microelectroplating technology; micropatterning; polymer composite; Coils; Electromagnetics; Fabrication; Magnetic flux; Magnetic resonance imaging; Micromechanical devices; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4673-0324-8
DOI :
10.1109/MEMSYS.2012.6170413
